Flow Range:0–15 SLPM
Accuracy:±(1.5% of reading + 0.5% of full scale)
Repeatability:±0.5% of full scale
Flow Range:0 - 2000 sccm
Accuracy:±(2.0 + 0.5FS)%
Range Ratio:100:1
Measurement Range:0–2 SLPM (Standard Liter per Minute)
Accuracy:±(1.5% + 0.2% F.S.)
Repeatability:±0.25%
Measurement Range:0–50 SLPM
Accuracy:±(2.0% + 0.5% F.S.)
Repeatability:±0.75%
Measurement Range:0–500 SLPM
Accuracy:±1.5% of Full Scale (F.S.)
Repeatability:±0.75%
Measurement Range:0 - 800 SLPM
Accuracy Grade:1.5% F.S
Nominal Diameter:19mm
パワー:11.4～25.2V
範囲:0.5～10, 1.8～32, 5～85, 9～150L/分
精度 全範囲:x±1% ((<50%範囲)
流量範囲:0 ~ 2000... 6000
正確さ:±(2.0+0.5FS) %
減額率:>100:1
服用用:乾燥ガス
範囲:+/- 200cm/min
正確さ:0.35 %
Monitoring scope:500sccm
Accuracy:0.5%
Output voltage:4.5V
ゼロポイント出力デリフト:+30 mV
出力変動:+0.12 %/oC
動作電源:8-18vdc,100mA
パス (N):2. 3. 4. 5
流量:1020 30 40 50 SLPM
範囲比:100:1
