測定範囲:0~300L/分
生産量:RS485
精度:±3%F.S.
質量流量:0 - 1000 sccm
精度:± 2 + 0.5 fs) %
応答時間:8msec
供給電圧:4.75〜5.25V
高レベル:4VDD
低レベル:0.8V
Output mode:Analog voltage (0.5 - 4.5VDC)
Interface type:M5 screw hole or JST electrical interface
Repeatability:±1.0%
Measuring Range:0 to 100%
Working Pressure:±100 mbar
Operating Temperature Range:15 to 40°C
Flow Range:0–15 SLPM
Accuracy:±(1.5% of reading + 0.5% of full scale)
Repeatability:±0.5% of full scale
Flow Range:0 - 2000 sccm
Accuracy:±(2.0 + 0.5FS)%
Range Ratio:100:1
Measurement Range:0–2 SLPM (Standard Liter per Minute)
Accuracy:±(1.5% + 0.2% F.S.)
Repeatability:±0.25%
Measurement Range:0–50 SLPM
Accuracy:±(2.0% + 0.5% F.S.)
Repeatability:±0.75%
Measurement Range:0–500 SLPM
Accuracy:±1.5% of Full Scale (F.S.)
Repeatability:±0.75%
Measurement Range:0 - 800 SLPM
Accuracy Grade:1.5% F.S
Nominal Diameter:19mm
パワー:11.4～25.2V
範囲:0.5～10, 1.8～32, 5～85, 9～150L/分
精度 全範囲:x±1% ((<50%範囲)
Japanese
